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1. The following is a valid expression involving tensors: (a) S a Tab = S c Tab (b) S a Tab = S a Tac (c) S a Tab = S c Tcb Cylindrical coordinates are related to cartesian coordinates via x = r cos , y = r sin , and z = z. This means that zz is given by (a) 1 (b) 1 (c) 0

63.3.5.2 Laser Microvia Hole Creation. Several laser systems have been developed to generate microvia holes for flexible circuits. The excimer laser has a wide capability to generate small holes on most organic substrates. It can generate holes 10 mm in diameter on 25-mm thick polyimide film, as shown in Fig. 63.5. The largest issue with the excimer laser is its slow speed. Appropriate process design is necessary to achieve a good productivity.

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FIGURE 63.5 Micro-blind vias drilled by different lasers. (a) Excimer laser, plated hole diameter 25 micrometer (b) YAG laser, plated hole diameter 20 micrometer, (c) Carbon dioxide laser, plated hole diameter 100 micrometer. (Source: Photo Machining.)

The UV:YAG laser is another choice for generating microvia holes smaller than 50 mm in diameter on flexible materials. It has a higher productivity rate than the excimer laser. It can drill through both copper foil and flexible substrates. An issue with the UV:YAG laser is that it takes a long time to generate large holes. The carbon dioxide laser has greater productivity than the excimer laser or the UV:YAG laser when used to generate via holes larger than 60 mm in diameter; however, it cannot drill through copper foil directly.As a result, a black surface treatment is required on the thin copper foils before the laser operation. (See Fig. 63.6) Comparisons of the technical capabilities of these micro via processes of the laser systems are shown in Table 63.4. Another major advantage of the laser via generation systems is RTR capability compared to the traditional mechanical NC drilling systems for the volume production of the double-side flexible circuits. It needs some modifications and loader and un-loader for the RTR systems for the standard laser equipment. Several laser systems are available for RTR process.

FIGURE 63.6 Microvia holes 50 micrometer in diameter created by carbon dioxide laser. (a) through hole, (b) blind via. (Source: Photo Machining.)

TABLE 63.4 Technical Capabilities of Microvia Hole Technologies for Double-Sided Flex Circuits Carbon dioxide 50 75 250 Fair Necessary Fair Fair Plasma etch 70 100 Fair No High Low Chemical etch 50 75 Fair No High Low

Excimer Hole size (mm) For small volume For large volume Hole quality Additional cleaning Technical hurdles Cost 10 25 150 Excellent Necessary Low High

63.3.5.3 Conformal masks for Microvia Generation. Mostly, the laser systems are capable for the drilling for both of base films and copper foils of the flexible laminates. It is possible to make microvia holes through copper foils by the same machine in one process. However, the drilling speeds on the copper foils by lasers are remarkably lower compared to organic base films. Copper laminate Therefore, the conformal mask systems with copper foils are recommended to use for the volume productions with a large numbers of the holes in a unit area. Copper etching The basic process is illustrated in Fig. 63.7. Firstly, small holes are generated on the copper foils by standard photolithography and etching process.The holes generated on the copper foils work as the masks for the laser Laser engraving drilling process. A slightly larger laser beam is irradiated on each opening of the copper foil, and the organic layers under the opening are engraved effectively. Copper plating To optimize the productivity of the laser drilling process, blind via hole structures are recommended for the high density flexible circuits. FIGURE 63.7 Conformal mask system for laser drilling.